Alexandre De Chambrier

Title: Innovations of Alexandre De Chambrier

Introduction

Alexandre De Chambrier is a notable inventor based in San Jose, California. He has made significant contributions to the field of radio frequency plasma processing systems. With a total of eight patents to his name, his work focuses on enhancing the efficiency and effectiveness of plasma technology.

Latest Patents

One of his latest patents is for inductive broad-band sensors for electromagnetic waves. This invention includes a broad-band sensor designed for a radio frequency plasma processing system. It features a reaction chamber housing an electrode within a vacuum processing environment. The sensor incorporates an inductive pickup positioned near the electrode, which consists of a wire formed into a loop extending in an azimuthal direction about the symmetry axis of the reaction chamber. A lead carrying an electric signal from the inductive pickup extends through a vacuum wall of the reaction chamber. An attenuator circuit, including an electrical resistance bridge, couples the lead to a signal carrier extending outside the vacuum processing environment. This broad-band sensor is capable of detecting radio frequency signals for measuring electromagnetic surface modes within the plasma chamber.

Another significant patent involves plasma non-uniformity detection. This method detects non-uniformity in a plasma within a radio frequency plasma processing system. It includes generating a plasma within a reaction chamber and detecting electrical signals from the plasma across a frequency range. A plurality of sensors is disposed azimuthally about the chamber's symmetry axis. The method compares the waveforms of the electrical signals picked up from the plasma and determines when a plasma non-uniformity occurs based on the electrical properties detected by each sensor.

Career Highlights

Alexandre De Chambrier works at Comet Technologies USA, Inc., where he continues to innovate in the field of plasma processing technology. His expertise and inventions have contributed to advancements in the industry, making him a valuable asset to his company.

Collaborations

He collaborates with talented individuals such as Stephen E. Savas and Ivan Shkurenkov, further enhancing the innovative environment at Comet Technologies.

Conclusion

Alexandre De Chambrier's contributions to the field of radio frequency plasma processing systems are noteworthy. His patents reflect a commitment to advancing technology and improving processes within the industry. His work continues to influence the development of innovative solutions in plasma technology.