Company Filing History:
Years Active: 2000-2004
Title: The Innovations of Alexander Savtchouk
Introduction
Alexander Savtchouk is a notable inventor based in Tampa, FL (US). He has made significant contributions to the field of semiconductor diagnostics, holding a total of 5 patents. His work primarily focuses on advanced methods for measuring dielectric properties in semiconductor materials.
Latest Patents
Savtchouk's latest patents include a groundbreaking method for measuring the thickness and capacitance of ultra-thin dielectrics in the presence of substantial leakage current. This method involves electrically charging the surface of a dielectric layer using a corona discharge source until a steady state is achieved. The corona flux is then abruptly terminated, allowing for the measurement of the surface potential over time. The steady state value of the surface potential is extrapolated to determine the thickness of the dielectric layer. This innovative approach produces highly accurate results for oxide thickness below 40 Å with a demonstrated repeatability of 0.03 Å across multiple measurements.
Another patent by Savtchouk describes a non-contact method for measuring the capacitance and equivalent oxide thickness of ultra-thin dielectric layers. Similar to his previous work, this method utilizes a corona discharge source to charge the dielectric layer until a steady state is reached. The subsequent measurement of surface potential decay provides insights into charge dissipation and capacitance calculations.
Career Highlights
Savtchouk is currently employed at Semiconductor Diagnostics, Inc., where he continues to innovate in the field of semiconductor technology. His expertise in dielectric measurement techniques has positioned him as a key figure in advancing semiconductor diagnostics.
Collaborations
Throughout his career, Savtchouk has collaborated with esteemed colleagues such as Jacek J Lagowski and Marshall D Wilson. These collaborations have further enriched his research and development efforts in semiconductor diagnostics.
Conclusion
Alexander Savtchouk's contributions to the field of semiconductor diagnostics through his innovative patents and collaborative efforts highlight his significant role as an inventor. His work continues to influence advancements in measuring dielectric properties, showcasing the importance of innovation in technology.