Alexander Kasic

Title: Alexander Kasic: Innovator in Trench Parameter Analysis

Introduction

Alexander Kasic is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of trench parameter analysis, holding a total of 2 patents. His work focuses on developing innovative apparatuses and methods that enhance the understanding and monitoring of trench structures.

Latest Patents

Kasic's latest patents include an "Apparatus and method for determining trench parameters" and an "Apparatus and method for monitoring trench profiles and for spectrometrologic analysis." The first patent describes an apparatus that includes an evaluating unit and a peak detection unit. This peak detection unit is designed to determine at least one peak parameter of a peak in a Fourier transformed reflection spectrum of infrared radiation reflected off a sample that may comprise trench structures. The evaluation unit then determines a trench parameter based on the peak parameter and a correction value containing information about the effective refractive index of the sample.

The second patent outlines an apparatus for monitoring a trench profile of a substrate. This apparatus includes a radiation-emitting unit that irradiates the substrate with infrared radiation. It measures the intensity and/or polarization state of the reflected infrared radiation at various measuring frequencies. An analyzing unit determines the respective reflectance and relative phase change and/or relative amplitude change in relation to the measuring frequency. By performing a Fourier transformation of the respective spectrum, a secondary Fourier spectrum is obtained, which helps identify reflective planes within the substrate at respective depths.

Career Highlights

Throughout his career, Kasic has worked with prominent companies such as Infineon Technologies AG and Nan Ya Technology Corporation. His experience in these organizations has contributed to his expertise in trench parameter analysis and related technologies.

Collaborations

Kasic has collaborated with notable individuals in his field, including Peter Weidner and Zhen-Long Chen. These collaborations have likely enriched his research and development efforts.

Conclusion

Alexander Kasic is a distinguished inventor whose work in trench parameter analysis has led to significant advancements in the field. His innovative patents and collaborations reflect his commitment to enhancing technology in this area.