Alan H Achilles

Title: Alan H Achilles: Innovator in Precision Measurement and Wafer Handling

Introduction

Alan H Achilles is a notable inventor based in San Jose, CA, with a focus on precision measurement and semiconductor technology. He holds 3 patents that showcase his innovative contributions to the field. His work has significantly impacted the way high-resolution imaging and wafer handling are approached in various applications.

Latest Patents

One of his latest patents is a detection system for precision measurements and high resolution. This invention improves techniques for imaging high-aspect-ratio structures, such as contact holes, by utilizing two signal detection sub-systems. One sub-system is optimized for imaging at the top, while the other is designed for imaging at the base of submicrometer structures. The signals produced by these systems can be combined in real-time to create images that resemble the 'extended focus' images obtained with confocal optical microscopes. Unlike confocal images, the resulting image maintains the linearity and resolution characteristics of electron-beam technology. This innovative approach allows for high-precision measurement without the need for extrapolation, as the signal exhibits its maximum at the base of the structure.

Another significant patent by Achilles is a high-speed wafer handling method. This invention describes a loading system designed for the rapid loading of wafers, such as semiconductor wafers, into vacuum chambers for various applications, including inspection and processing using a scanning electron microscope (SEM). The system ensures low contamination from atmospheric conditions during both the loading and unloading processes, enhancing the efficiency and reliability of wafer handling.

Career Highlights

Throughout his career, Alan H Achilles has worked with prominent companies, including Metrologix, Inc. and North American Philips Corporation. His experience in these organizations has contributed to his expertise in precision measurement and semiconductor technologies.

Collaborations

Achilles has collaborated with notable professionals in his field, including Guillermo L Toro-Lira and Alan C Abel. These collaborations have further enriched his work and innovations.

Conclusion

Alan H Achilles is a distinguished inventor whose contributions to precision measurement and wafer handling have made a significant impact in the technology sector. His innovative patents reflect his commitment to advancing the field and improving existing methodologies.