Company Filing History:
5 out of 2,253 
2 out of 39,238 
1 out of 1 Years Active: 1999-2014
Title: Akiyoshi Tsuda: Innovator in Electron Beam Technology
Introduction
Akiyoshi Tsuda is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of electron beam technology, holding a total of 5 patents. His work has been instrumental in advancing the capabilities of electron beam exposure apparatuses and detectors.
Latest Patents
One of Tsuda's latest patents is a sample holder for electron beam exposure apparatus and an electron beam exposure method using the same. This innovative sample holder is designed to be placed between an electrostatic chuck and a sample that is smaller than the upper surface of the chuck. It features a base plate that matches the size of the chuck's upper surface, a sample placement portion for positioning the sample, and a circumferential portion made of conductive material exposed to the outside.
Another notable patent is for an electron beam detector, which includes an electron beam scatterer positioned at a specific distance below a shield with multiple openings. This design ensures that the beam detection element, located below the scatterer, can convert the electron beam into an electric signal effectively. The arrangement minimizes variations in detection sensitivity based on the position of the openings in the shield.
Career Highlights
Throughout his career, Akiyoshi Tsuda has worked with notable companies such as Advantest Corporation and Fujitsu Corporation. His experience in these organizations has allowed him to refine his expertise in electron beam technologies and contribute to various innovative projects.
Collaborations
Tsuda has collaborated with esteemed colleagues, including Kazushi Ishida and Nobuyuki Yasutake. Their combined efforts have furthered advancements in the field of electron beam technology.
Conclusion
Akiyoshi Tsuda's contributions to electron beam technology through his patents and collaborations highlight his role as a key innovator in this specialized field. His work continues to influence advancements in electron beam applications and methodologies.