IDiyas

For the Inventor, By the Inventor

Miyagi, Japan

Akira Nakagawa

USPTO Granted Patents = 6 

 

Average Co-Inventor Count = 1.7

ph-index = 3

Forward Citations = 65(Granted Patents)


Location History:

  • Nirasaki, JP (2013)
  • Kurokawa, JP (2015)
  • Gyeonggi-Do, KR (2015)
  • Miyagi, JP (2014 - 2016)
  • Beaverton, OR (US) (2016)

Company Filing History:

goldMedal6 out of 10,295 
 
Tokyo Electron Limited
 patents

Years Active: 2013-2016

where 'Filed Patents' based on already Granted Patents

6 patents (USPTO):
1. 9396960 - Plasma processing method and plasma processing apparatus (2016-07-19),
2. 9324575 - Plasma etching method and plasma etching apparatus (2016-04-26),
3. 9039909 - Plasma etching method, semiconductor device manufacturing method and computer-readable storage medium (2015-05-26),
4. 9034198 - Plasma etching method (2015-05-19),
5. 8679358 - Plasma etching method and computer-readable storage medium (2014-03-25),
6. 8569176 - Substrate processing method (2013-10-29),
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