Location History:
- Nirasaki, JP (2012)
- Yamanashi, JP (2020)
Company Filing History:
Years Active: 2012-2020
Title: Akinori Shimamura: Innovator in Plasma Processing Technology
Introduction
Akinori Shimamura is a notable inventor based in Yamanashi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 2 patents. His innovative work focuses on improving the efficiency and effectiveness of various processing apparatuses.
Latest Patents
One of his latest patents is the "Reduced-pressure drying apparatus." This invention is designed for drying solutions on a substrate within a chamber under a depressurized state. It features a solvent collecting unit that is a net-shaped plate, which temporarily collects the solvent vaporized from the substrate. The net-shaped plate is strategically positioned to face the substrate and has an opening ratio of 60% to 80%, with a thermal capacity of 850 J/K or less per 1 m.
Another significant patent is the "Process gas introducing mechanism and plasma processing device." This mechanism is crucial for introducing a processing gas into a processing space, situated between a plasma generation unit and the chamber of a plasma processing apparatus. It includes a gas introducing base with a gas introducing path and a near ring-shaped gas introducing plate that can be detached. The design allows for efficient discharge of the processing gas into the processing space through multiple gas discharge holes.
Career Highlights
Akinori Shimamura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this organization has allowed him to further develop his innovative ideas and contribute to advancements in technology.
Collaborations
Throughout his career, Akinori has collaborated with talented individuals such as Takayuki Kamaishi and Masato Morishima. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.
Conclusion
Akinori Shimamura is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the field. His patents reflect his commitment to innovation and efficiency, making him a valuable contributor to the industry.