The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2020
Filed:
Sep. 28, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Akinori Shimamura, Yamanashi, JP;
Teruyuki Hayashi, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F26B 5/04 (2006.01); H01L 51/56 (2006.01); F26B 3/30 (2006.01); F26B 9/06 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); F26B 3/30 (2013.01); F26B 5/04 (2013.01); F26B 5/042 (2013.01); F26B 9/06 (2013.01); H01L 51/0007 (2013.01); H01L 51/0025 (2013.01);
Abstract
A reduced-pressure drying apparatus, for drying solution on a substrate in a chamber in a depressurized state, includes a solvent collecting unit that is a net-shaped plate configured to temporarily collect a solvent in the solution vaporized from the substrate. The solvent collecting unit is provided to face the substrate in the chamber, and the net-shaped plate has an opening ratio of 60% to 80% and a thermal capacity of 850 J/K or less per 1 m.