Nirasaki, Japan

Akihiro Yoshimura



Average Co-Inventor Count = 2.8

ph-index = 2

Forward Citations = 441(Granted Patents)


Location History:

  • Nirasaka, JP (2010)
  • Nirasaki, JP (2014)
  • Yamanishi, JP (2016)
  • Miyagi, JP (2014 - 2020)

Company Filing History:


Years Active: 2010-2020

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7 patents (USPTO):Explore Patents

Title: Akihiro Yoshimura: Innovator in Substrate Processing Technology

Introduction

Akihiro Yoshimura is a prominent inventor based in Nirasaki, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 7 patents. His innovative designs and solutions have advanced the efficiency and functionality of substrate processing apparatuses.

Latest Patents

Yoshimura's latest patents include a "Supporting Member and Substrate Processing Apparatus." The supporting member is designed to support at least one pipe that connects a temperature adjusting unit with a substrate processing apparatus. This temperature adjusting unit is crucial for regulating the temperature of various components within the substrate processing apparatus. The supporting member features a hollow portion where the pipe is arranged, enhancing its structural integrity and functionality.

Another notable patent is the "Substrate Processing Apparatus," which comprises a chamber that includes a process chamber for performing processes on a substrate using gas. This apparatus also features an exhaust chamber for evacuating gas from the process chamber. A shield member separates these two chambers, and a hollow relay member allows communication between the chamber and an external pressure gauge. This relay member is designed to manage the flow of gases, ensuring efficient operation.

Career Highlights

Akihiro Yoshimura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at Tokyo Electron has allowed him to collaborate on various innovative projects that push the boundaries of substrate processing technology.

Collaborations

Yoshimura has worked alongside notable colleagues such as Masaaki Miyagawa and Tetsuji Sato. Their combined expertise has contributed to the development of advanced technologies in their field.

Conclusion

Akihiro Yoshimura's contributions to substrate processing technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing processes.

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