Location History:
- Yamanashi, JP (2014)
- Miyagi, JP (2014 - 2024)
Company Filing History:
Years Active: 2014-2025
Title: **Akihiro Yokota: Innovator in Plasma Processing Technology**
Introduction
Akihiro Yokota, a prominent inventor based in Miyagi, Japan, is renowned for his contributions to plasma processing technology. With a remarkable portfolio of 13 patents, Yokota has significantly influenced advancements in this specialized field. His work reflects a deep understanding of the complexities involved in substrate processing and electromagnetic systems.
Latest Patents
Yokota's latest patents showcase innovative solutions in plasma processing systems and methods. One of his notable inventions is a plasma processing system that includes a chamber, a substrate support, a plasma generator, and two electric magnet assemblies. This system is designed so that the center of the substrate on the support is aligned with the chamber's central axis, allowing optimal plasma generation. The first electric magnet assembly creates a magnetic field within the chamber, while the second assembly reduces the intensity of this magnetic field at the substrate's center, enhancing processing efficiency. Additionally, his plasma processing method delineates a two-step process, where the second plasma processing phase utilizes a greater power of radio frequency waves. This method is further characterized by a strategic magnetic field distribution that varies across the workpiece, optimizing performance.
Career Highlights
Throughout his career at Tokyo Electron Limited, Yokota has continually pushed the boundaries of plasma processing innovation. His extensive experience and the successful development of 13 patents highlight his role as a pivotal figure in the semiconductor manufacturing industry. Akihiro's expertise in creating sophisticated plasma systems has garnered recognition, establishing him as a leader in his field.
Collaborations
Yokota has collaborated with esteemed colleagues, including Shinji Himori and Etsuji Ito. Their combined expertise has fostered an environment of innovation, leading to advancements that have a lasting impact on the industry. These collaborations underscore the importance of teamwork in driving significant technological developments.
Conclusion
Akihiro Yokota's contributions to the field of plasma processing through his inventive patents and collaborative efforts have significantly shaped the landscape of semiconductor technology. His ongoing commitment to innovation continues to inspire future developments in the industry, securing his legacy as a vital inventor in the realm of engineering and technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.