Company Filing History:
Years Active: 2019-2024
Title: Abhijit Patil: Innovator in Metal Etching Technologies
Introduction
Abhijit Patil is a prominent inventor based in San Jose, California. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of metal etching technologies. With a total of six patents to his name, Patil's work has advanced the efficiency and effectiveness of processes used in the industry.
Latest Patents
One of Patil's latest patents focuses on methods of etching metal-containing layers. This innovative method involves removing a metal-containing layer, such as tungsten, from a substrate. The process includes generating a first plasma in a plasma chamber while a patterned device is positioned on a substrate support. The patterned device consists of both a patterned region and an unpatterned region, along with a tungsten-containing layer formed over the substrate. The method allows for the deposition of a first film over the patterned region while effectively removing portions of the unpatterned region without depositing the film there. This advancement enhances the precision of metal layer removal in semiconductor fabrication.
Career Highlights
Abhijit Patil is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has positioned him as a key player in the development of innovative technologies that drive the industry forward. Patil's expertise in etching processes has been instrumental in improving manufacturing techniques.
Collaborations
Throughout his career, Patil has collaborated with notable colleagues, including Akhil Mehrotra and Gene S. Lee. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Abhijit Patil's contributions to the field of semiconductor manufacturing, particularly in metal etching technologies, have established him as a significant inventor. His innovative methods and collaborations continue to influence the industry positively.
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