Palo Alto, CA, United States of America

Abhay K Bhushan


Average Co-Inventor Count = 5.4

ph-index = 11

Forward Citations = 314(Granted Patents)


Company Filing History:


Years Active: 1996-2002

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16 patents (USPTO):Explore Patents

Title: Abhay K Bhushan: Innovator in Semiconductor Cleaning Technology

Introduction

Abhay K Bhushan is a prominent inventor based in Palo Alto, California, known for his significant contributions to semiconductor cleaning technology. With a total of 16 patents to his name, Bhushan has made a notable impact in the field of electronics and materials science.

Latest Patents

One of his latest patents is for an ultra-low particle semiconductor cleaner. This innovative method involves immersing a semiconductor wafer in a liquid comprising water. The wafer has a front face, a back face, and an edge. The method also includes providing a substantially particle-free environment adjacent to the front and back faces as the liquid is being removed. Additionally, a step of introducing a carrier gas comprising a cleaning enhancement substance during the providing step is included. This cleaning enhancement substance dopes the liquid attached to the front and back faces, creating a concentration gradient that accelerates the fluid flow of the attached liquid off the wafer.

Career Highlights

Throughout his career, Abhay K Bhushan has worked with several companies, including Yieldup International and Scd Mountain View, Inc. His work has focused on developing advanced cleaning methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Collaborations

Bhushan has collaborated with notable individuals in the industry, including Raj Mohindra and Rajiv Bhushan. These collaborations have contributed to the advancement of his innovative technologies and methodologies.

Conclusion

Abhay K Bhushan's contributions to semiconductor cleaning technology exemplify his dedication to innovation and excellence in the field. His patents and career achievements reflect a commitment to improving manufacturing processes in the electronics industry.

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