Enter assignee name

% Expired Patents = 75.0

Trademarks = 2

Forward Citations = 124

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4 inventors (with patents filed for the assignee):

Stephen J Benner (11 out of 12 patents)

Yuzhuo Li (1 out of 33 patents)

Rodney F Webre, Jr (1 out of 1 patent)

4. Oris H Dinger, Jr (1 out of 1 patent)

12 patents: Sort by Forward Citations

1. 8025555 - System for measuring and controlling the level of vacuum applied to a conditioning holder within a CMP system (2011-09-27),

2. 7913705 - Cleaning cup system for chemical mechanical planarization apparatus (2011-03-29),

3. 7909910 - Vacuum line clean-out separator system (2011-03-22),

4. 7901267 - Method for controlling the forces applied to a vacuum-assisted pad conditioning system (2011-03-08),

5. 7575503 - Vacuum-assisted pad conditioning system (2009-08-18),

6. 7544113 - Apparatus for controlling the forces applied to a vacuum-assisted pad conditioning system (2009-06-09),

7. 7258600 - Vacuum-assisted pad conditioning system (2007-08-21),

8. 7217172 - Enhanced end effector arm arrangement for CMP pad conditioning (2007-05-15),

9. 7166014 - Chemical mechanical planarization process control utilizing in-situ conditioning process (2007-01-23),

10. 7052371 - Vacuum-assisted pad conditioning system and method utilizing an apertured conditioning disk (2006-05-30),

11. 7040967 - Multi-step, in-situ pad conditioning system and method for chemical mechanical planarization (2006-05-09),

12. 4199298 - Trailer for skid mounted tanks (1980-04-22),

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Profile summary based on public USPTO records.