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For the Inventor, By the Inventor

Tokyo, Japan

M - Fsi Ltd.


USPTO Granted Patents = 4

Forward Citations = 56

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9 inventors (with patents filed for the assignee):

goldMedal Takeji Ueda (2 out of 9 patents)

silverMedal Kousaku Matsuno (2 out of 3 patents)

bronzeMedal Masao Iga (2 out of 3 patents)

4.  Nobuhiko Izuta (1 out of 2 patents)

5.  Mitsugu Murata (1 out of 1 patent)

6.  Jun Kanayasu (1 out of 1 patent)

7.  Satoshi Shikami (1 out of 3 patents)

8.  Koji Oka (1 out of 3 patents)

9.  Sanae Sumi (1 out of 1 patent)


4 patents:

1. 7238295 - Regeneration process of etching solution, etching process, and etching system (2007-07-03),
2. 6983756 - Substrate treatment process and apparatus (2006-01-10),
3. 6874516 - Substrate cleaning apparatus (2005-04-05),
4. 6866723 - Wet cleaning process and wet cleaning equipment (2005-03-15),
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USPTO Data Jan 1 1976 - Dec 16 2025

4 Patents

#2,784 in Tokyo

#7,410 in Japan

...
Tokyo, Japan

M - Fsi Ltd.

Forward Citations = 56

9 inventors:

goldMedal Takeji Ueda (2 out of 9 patents)

silverMedal Kousaku Matsuno (2 out of 3 patents)

bronzeMedal Masao Iga (2 out of 3 patents)

4.  Nobuhiko Izuta (1 out of 2 patents)

5.  Mitsugu Murata (1 out of 1 patent)

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