Okayama, Japan

Sanae Sumi


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2005

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1 patent (USPTO):Explore Patents

Title: The Innovative Contributions of Sanae Sumi

Introduction

Sanae Sumi is a notable inventor based in Okayama, Japan. She has made significant contributions to the field of semiconductor device fabrication. Her innovative approach to wet cleaning processes has garnered attention in the industry.

Latest Patents

Sanae Sumi holds a patent for a wet cleaning process and wet cleaning equipment. This patent describes a method useful in chemical processing and rinsing steps during the fabrication of semiconductor devices. The process involves treating a substrate with a desired liquid while revolving it around an axis of rotation. This technique ensures that the liquid flows on the substrate's surface under a centrifugal force greater than gravity. The method allows for even treatment of the substrate surface, avoiding any stagnation or conflicting flows of the liquid.

Career Highlights

Sanae Sumi is currently associated with M-Fsi Ltd., where she continues to develop her innovative ideas. Her work has been instrumental in advancing the technology used in semiconductor manufacturing. With her expertise, she has contributed to improving the efficiency and effectiveness of wet cleaning processes.

Collaborations

Sanae collaborates with talented individuals in her field, including Takeji Ueda and Koji Oka. These partnerships enhance her research and development efforts, leading to more innovative solutions in semiconductor fabrication.

Conclusion

Sanae Sumi's contributions to the semiconductor industry through her innovative wet cleaning process highlight her role as a leading inventor. Her work not only advances technology but also sets a standard for future developments in the field.

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