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Santa Clara, CA, United States of America

Luxtron Corporation

USPTO Granted Patents = 65

Trademarks = 3

Forward Citations = 2,347

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38 inventors (with patents filed for the assignee):

Kenneth A Wickersheim (17 out of 19 patents)

Mei H Sun (15 out of 44 patents)

Herbert E Litvak (11 out of 16 patents)

4. Charles W Schietinger (10 out of 11 patents)

5. Bruce E Adams (9 out of 75 patents)

6. Earl M Jensen (7 out of 7 patents)

7. Stanley O Heinemann (5 out of 7 patents)

8. Anh Ngoc Hoang (4 out of 8 patents)

9. Dmitry Vasily Bakin (4 out of 27 patents)

10. Dieter L Rall (4 out of 8 patents)

11. John P Gotthold (3 out of 4 patents)

12. Terry M Stapleton (3 out of 5 patents)

13. Stephen R Phillips (3 out of 10 patents)

14. Steven C Leach (3 out of 6 patents)

15. Robert Champetier (2 out of 2 patents)

Core Competencies:

Optical Techniques

Temperature Measurement

Layer Thickness Measurement

Non-Contact Measurement

Endpoint Detection

Luminescent Sensors

Fiberoptic Sensors

Signal Processing

Electro-Optical Assembly

Interference Removal

Surface Condition Measurement

Modular Measuring Systems

65 patents: Sort by Forward Citations

1. 7374335 - In situ optical surface temperature measuring techniques and devices (2008-05-20),

2. 7080940 - In situ optical surface temperature measuring techniques and devices (2006-07-25),

3. 7042581 - Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers (2006-05-09),

4. 6934040 - Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers (2005-08-23),

5. 6654132 - Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers (2003-11-25),

6. 6572265 - In situ optical surface temperature measuring techniques and devices (2003-06-03),

7. 6570662 - Optical techniques for measuring layer thicknesses and other surface characteristics of objects such as semiconductor wafers (2003-05-27),

8. 6426232 - Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment (2002-07-30),

9. 6406641 - Liquid etch endpoint detection and process metrology (2002-06-18),

10. 6222632 - Polarization interferometer spectrometer with rotatable birefringent element (2001-04-24),

11. 6110752 - Optical techniques of measuring endpoint during the processing of (2000-08-29),

12. 6077452 - Optical techniques of measuring endpoint during the processing of (2000-06-20),

13. 6028669 - Signal processing for in situ monitoring of the formation or removal of (2000-02-22),

14. 6010538 - In situ technique for monitoring and controlling a process of (2000-01-04),

15. 5946082 - Interference removal (1999-08-31),

Luxtron Corporation is a leading technology company specializing in the development of innovative electronic devices. With a focus on cutting-edge solutions, Luxtron designs and manufactures high-quality products for a wide range of industries including consumer electronics, telecommunications, and automotive. Our dedicated team of experts strives to deliver breakthrough technology that enhances people's lives and drives industry advancement. Visit our website to explore our latest products and learn more about Luxtron's commitment to innovation.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

65 Patents

#81 in Santa Clara, CA

#1,271 in California

#5,378 in US

#10,892 in the World

Santa Clara, CA, United States of America

Luxtron Corporation

Forward Citations = 2,347

38 inventors:

Kenneth A Wickersheim (17 out of 19 patents)

Mei H Sun (15 out of 44 patents)

Herbert E Litvak (11 out of 16 patents)

4. Charles W Schietinger (10 out of 11 patents)

5. Bruce E Adams (9 out of 75 patents)

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