Earl M Jensen

Title: Earl M Jensen: Innovator in Semiconductor Processing Technologies

Introduction

Earl M Jensen is a prominent inventor based in Sunnyvale, California, known for his significant contributions to semiconductor processing technologies. With a total of 7 patents to his name, Jensen has developed innovative solutions that enhance the efficiency and effectiveness of various manufacturing processes.

Latest Patents

Among his latest patents is an in situ technique for monitoring and controlling a process in an apparatus designed for removing material from an article, such as an exposed surface of an intermediate integrated circuit structure. This invention utilizes a sensor that is mechanically coupled to a moving carrier of the article, directing an electromagnetic radiation beam through the article to its first side. The beam, which interacts with the article, is detected after being reflected from its exposed surface. The resulting information regarding the state of the processing is transmitted to a stationary receiver without the need for physical transmission media like wires or optical fibers. Multiple sensors mounted on the moving article carrier provide valuable data on the uniformity of the processing across the exposed surface, allowing for effective monitoring and control.

Another notable patent involves an electro-optical board assembly for measuring the temperature of an object without direct contact. This system employs an automatic gain control technique that integrates samples of an incoming analog signal over a controlled time period. The system is particularly useful for measuring the temperature of a semiconductor wafer within a processing chamber while integrated circuits are being formed. The design includes a single printed circuit board with a metal heat sink structure and a cooling unit, enhancing the signal-to-noise ratio and enabling accurate temperature measurements down to approximately 250 degrees Celsius.

Career Highlights

Earl M Jensen has made a significant impact in the field of semiconductor technology through his innovative patents and solutions. His work at Luxtron Corporation has positioned him as a key player in advancing the capabilities of semiconductor manufacturing processes.

Collaborations

Jensen has collaborated with notable colleagues, including Mei H Sun and David L Vecht, contributing to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Earl M Jensen's contributions to semiconductor processing technologies through his patents and innovative solutions have made a lasting impact on the industry. His work continues to influence advancements in manufacturing processes, showcasing the importance of innovation in technology.