Forward Citations = 206

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6 inventors (with patents filed for the assignee):

Harry L Tuller (6 out of 33 patents)

Richard Mlcak (6 out of 10 patents)

Dharanipal Doppalapudi (4 out of 4 patents)

4. Theodore D Moustakas (2 out of 31 patents)

5. Richard Micak (1 out of 1 patent)

6. Marlene A Spears (1 out of 3 patents)

7 patents: Sort by Forward Citations

1. 6953977 - Micromechanical piezoelectric device (2005-10-11),

2. 6627965 - Micromechanical device with an epitaxial layer (2003-09-30),

3. 6627959 - P-n junction sensor (2003-09-30),

4. 6544674 - Stable electrical contact for silicon carbide devices (2003-04-08),

5. 6511915 - Electrochemical etching process (2003-01-28),

6. 6441716 - Semiconductor piezoresistor (2002-08-27),

7. 6275137 - Semiconductor piezoresistor (2001-08-14),

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USPTO Data Jan 1 1976 - Dec 23 2025

7 Patents

#80 in Woburn, MA

#2,240 in Massachusetts

#38,780 in US

Woburn, MA, United States of America

Boston Microsystems, Inc.