The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 2005
Filed:
Oct. 29, 2002
Richard Mlcak, Cambridge, MA (US);
Dharanipal Doppalapudi, Somerville, MA (US);
Harry L. Tuller, Wellesley, MA (US);
Richard Mlcak, Cambridge, MA (US);
Dharanipal Doppalapudi, Somerville, MA (US);
Harry L. Tuller, Wellesley, MA (US);
Boston MicroSystems, Inc., Woburn, MA (US);
Abstract
A micromechanical device includes a single crystal micromachined micromechanical structure. At least a portion of the micromechanical structure is capable of performing a mechanical motion. A piezoelectric epitaxial layer covers at least a part of said portion of the micromechanical structure that is capable of performing a mechanical motion. The micromechanical structure and piezoelectric epitaxial layer are composed of different materials. At least one electrically conducting layer is formed to cover at least part of the piezoelectric epitaxial layer.