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Forward Citations = 257

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8 inventors (with patents filed for the assignee):

Igor C Ivanov (11 out of 64 patents)

Artur Kolics (6 out of 60 patents)

Jonathan Xiaohang Zhang (5 out of 16 patents)

4. Chiu H Ting (4 out of 33 patents)

5. Nicolai Petrov (3 out of 4 patents)

6. Weiguo Zhang (1 out of 7 patents)

7. Arthur Kolics (1 out of 1 patent)

8. Welguo Zhang (1 out of 1 patent)

11 patents: Sort by Forward Citations

1. 7235483 - Method of electroless deposition of thin metal and dielectric films with temperature controlled stages of film growth (2007-06-26),

2. 6939403 - Spatially-arranged chemical processing station (2005-09-06),

3. 6935638 - Universal substrate holder for treating objects in fluids (2005-08-30),

4. 6913651 - Apparatus and method for electroless deposition of materials on semiconductor substrates (2005-07-05),

5. 6911067 - Solution composition and method for electroless deposition of coatings free of alkali metals (2005-06-28),

6. 6908512 - Temperature-controlled substrate holder for processing in fluids (2005-06-21),

7. 6902605 - Activation-free electroless solution for deposition of cobalt and method for deposition of cobalt capping/passivation layer on copper (2005-06-07),

8. 6881437 - Methods and system for processing a microelectronic topography (2005-04-19),

9. 6860944 - Microelectronic fabrication system components and method for processing a wafer using such components (2005-03-01),

10. 6846519 - Method and apparatus for electroless deposition with temperature-controlled chuck (2005-01-25),

11. 6794288 - Method for electroless deposition of phosphorus-containing metal films onto copper with palladium-free activation (2004-09-21),

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