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For the Inventor, By the Inventor

Wilmington, DE, United States of America

Akrion Technologies, Inc.


USPTO Granted Patents = 12

% Expired Patents = 33.3


Trademarks = 3

Forward Citations = 44

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13 inventors (with patents filed for the assignee):

goldMedal Mario E Bran (6 out of 36 patents)

silverMedal Yi Wu (3 out of 8 patents)

bronzeMedal Ismail Kashkoush (2 out of 26 patents)

4.  Cole Franklin (2 out of 5 patents)

5.  Brian Fraser (2 out of 3 patents)

6.  Gim-Syang Chen (1 out of 9 patents)

7.  Richard Novak (1 out of 25 patents)

8.  Paul Mertens (1 out of 32 patents)

9.  Thomas Nicolosi (1 out of 1 patent)

10.  Jeffrey M Lauerhaas (1 out of 3 patents)

11.  William Fyen (1 out of 2 patents)

12.  Tom Nicolosi (1 out of 2 patents)

13.  Thomas J Nicolosi, Jr (1 out of 2 patents)


12 patents:

1. 7518288 - System for megasonic processing of an article (2009-04-14),
2. 7311847 - System and method for point-of-use filtration and purification of fluids used in substrate processing (2007-12-25),
3. 7287537 - Megasonic probe energy director (2007-10-30),
4. 7268469 - Transducer assembly for megasonic processing of an article and apparatus utilizing the same (2007-09-11),
5. 7211932 - Apparatus for megasonic processing of an article (2007-05-01),
6. 7185661 - Reciprocating megasonic probe (2007-03-06),
7. 7169253 - Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing (2007-01-30),
8. 7156111 - Megasonic cleaning using supersaturated cleaning solution (2007-01-02),
9. 7117876 - Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate (2006-10-10),
10. 7104268 - Megasonic cleaning system with buffered cavitation method (2006-09-12),
11. 7100304 - Megasonic cleaner and dryer (2006-09-05),
12. 7047989 - Sonic-energy cleaner system with gasified fluid (2006-05-23),
Company Overview
Akrion Technologies, Inc. is a leading provider of advanced process equipment and solutions for the semiconductor and microelectronics industries. The company specializes in developing innovative technologies that enhance manufacturing processes, focusing on cleaning and surface preparation. With a commitment to research and development, Akrion aims to improve efficiency and yield in semiconductor fabrication. Headquartered in Wilmington, Delaware, Akrion serves a global clientele, contributing to the evolution of cutting-edge electronic devices.
Profile summary synthesized from public USPTO records and patent filings.

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USPTO Data Jan 1 1976 - Oct 20 2026

12 Patents

#297 in

#25,578 in

#48,209 in the World

Wilmington, DE (US)
Wilmington, DE, United States of America

Akrion Technologies, Inc.

Forward Citations = 44

13 inventors:

goldMedal Mario E Bran (6 out of 36 patents)

silverMedal Yi Wu (3 out of 8 patents)

bronzeMedal Ismail Kashkoush (2 out of 26 patents)

4.  Cole Franklin (2 out of 5 patents)

5.  Brian Fraser (2 out of 3 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Akrion Technologies, Inc.. Retrieved from https://idiyas.com/company/akrion-technologies

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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