For the Inventor, By the Inventor

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Wilmington, DE, United States of America

Akrion Technologies, Inc.

USPTO Granted Patents = 12

EPO Patents = 1

Trademarks = 4

Forward Citations = 43

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13 inventors (with patents filed for the assignee):

Mario E Bran (6 out of 36 patents)

Yi Wu (3 out of 8 patents)

Ismail Kashkoush (2 out of 26 patents)

4. Cole Franklin (2 out of 5 patents)

5. Brian Fraser (2 out of 3 patents)

6. Gim-Syang Chen (1 out of 9 patents)

7. Richard Novak (1 out of 25 patents)

8. Paul Mertens (1 out of 32 patents)

9. Thomas Nicolosi (1 out of 1 patent)

10. Jeffrey M Lauerhaas (1 out of 3 patents)

11. William Fyen (1 out of 2 patents)

12. Tom Nicolosi (1 out of 2 patents)

13. Thomas J Nicolosi, Jr (1 out of 2 patents)

12 patents: Sort by Forward Citations

1. 7518288 - System for megasonic processing of an article (2009-04-14),

2. 7311847 - System and method for point-of-use filtration and purification of fluids used in substrate processing (2007-12-25),

3. 7287537 - Megasonic probe energy director (2007-10-30),

4. 7268469 - Transducer assembly for megasonic processing of an article and apparatus utilizing the same (2007-09-11),

5. 7211932 - Apparatus for megasonic processing of an article (2007-05-01),

6. 7185661 - Reciprocating megasonic probe (2007-03-06),

7. 7169253 - Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing (2007-01-30),

8. 7156111 - Megasonic cleaning using supersaturated cleaning solution (2007-01-02),

9. 7117876 - Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate (2006-10-10),

10. 7104268 - Megasonic cleaning system with buffered cavitation method (2006-09-12),

11. 7100304 - Megasonic cleaner and dryer (2006-09-05),

12. 7047989 - Sonic-energy cleaner system with gasified fluid (2006-05-23),

Akrion Technologies, Inc. is a leading provider of advanced surface preparation systems and processes for the semiconductor and related industries. With over 30 years of experience, we offer innovative solutions for cleaning, etching, and surface conditioning applications. Our advanced technologies enable our customers to achieve higher yields, improved device performance, and reduced costs in the production of integrated circuits, MEMS, and other microelectronics devices.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

12 Patents

#281 in

#24,779 in

#46,665 in the World

Wilmington, DE, United States of America

Akrion Technologies, Inc.

Forward Citations = 43

13 inventors:

Mario E Bran (6 out of 36 patents)

Yi Wu (3 out of 8 patents)

Ismail Kashkoush (2 out of 26 patents)

4. Cole Franklin (2 out of 5 patents)

5. Brian Fraser (2 out of 3 patents)

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