The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Jan. 10, 2003
Yi Wu, Irvine, CA (US);
Cole S. Franklin, San Clemente, CA (US);
Brian Fraser, Los Angeles, CA (US);
Thomas Nicolosi, Mission Viejo, CA (US);
Yi Wu, Irvine, CA (US);
Cole S. Franklin, San Clemente, CA (US);
Brian Fraser, Los Angeles, CA (US);
Thomas Nicolosi, Mission Viejo, CA (US);
Akrion Technologies, Inc., Wilmington, DE (US);
Abstract
A wafer cleaning method and system including a combined high frequency signal, a low frequency signal, and in one embodiment a biased voltage signal, allows cleaning particles and impurities off of fine-structured wafers, through application of an acoustic field to the wafer through a cleaning liquid which fosters micro-bubble formation for effective cleaning while buffering micro-bubble growth which would otherwise damage the wafer.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile