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Akrion Systems, LLC

USPTO Granted Patents = 22

% Expired Patents = 22.7

Trademarks = 3

Forward Citations = 109

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20 inventors (with patents filed for the assignee):

Ismail Kashkoush (8 out of 26 patents)

John A Korbler (6 out of 10 patents)

Hanjoo Lee (6 out of 7 patents)

4. Richard Novak (4 out of 25 patents)

5. Mark Rouillard (4 out of 4 patents)

6. Chad Michael Hosack (3 out of 6 patents)

7. James Brown (3 out of 3 patents)

8. Mario E Bran (3 out of 36 patents)

9. Gim-Syang Chen (2 out of 9 patents)

10. Zhi Lewis Liu (2 out of 2 patents)

11. Yan Fan (2 out of 2 patents)

12. Pejman Fani (2 out of 3 patents)

13. Christopher Hahn (2 out of 2 patents)

14. Zhi (Lewis) Liu (2 out of 3 patents)

15. Cole Franklin (2 out of 5 patents)

22 patents: Sort by Forward Citations

1. 9337065 - Systems and methods for drying a rotating substrate (2016-05-10),

2. 9305768 - Method for processing flat articles (2016-04-05),

3. 9070722 - System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid (2015-06-30),

4. 9049520 - Composite transducer apparatus and system for processing a substrate and method of constructing the same (2015-06-02),

5. 8987032 - Method for selective under-etching of porous silicon (2015-03-24),

6. 8771427 - Method of manufacturing integrated circuit devices (2014-07-08),

7. 8741066 - Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting (2014-06-03),

8. 8739429 - Systems and methods for drying a rotating substrate (2014-06-03),

9. 8343287 - Apparatus for ejecting fluid onto a substrate and system and method incorporating the same (2013-01-01),

10. 8316869 - Acoustic energy system, method and apparatus for processing flat articles (2012-11-27),

11. 8279712 - Composite transducer apparatus and system for processing a substrate and method of constructing the same (2012-10-02),

12. 8276291 - Systems and methods for drying a rotating substrate (2012-10-02),

13. 8257505 - Method for megasonic processing of an article (2012-09-04),

14. 8084280 - Method of manufacturing a solar cell using a pre-cleaning step that contributes to homogeneous texture morphology (2011-12-27),

15. 8056253 - Systems and methods for drying a rotating substrate (2011-11-15),

Company Overview

Akrion Systems, LLC specializes in advanced cleaning and surface preparation technologies for the semiconductor and microelectronics industries. The company develops innovative solutions that enhance manufacturing processes, focusing on precision cleaning equipment and chemical delivery systems. With a commitment to research and development, Akrion Systems aims to address the evolving needs of its clients in a highly competitive global market, ensuring optimal performance and reliability in semiconductor fabrication.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 20 2026

22 Patents

#58 in

#290 in

#28,807 in the World

Akrion Systems, LLC

Forward Citations = 109

20 inventors:

Ismail Kashkoush (8 out of 26 patents)

John A Korbler (6 out of 10 patents)

Hanjoo Lee (6 out of 7 patents)

4. Richard Novak (4 out of 25 patents)

5. Mark Rouillard (4 out of 4 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Akrion Systems, LLC. Retrieved from https://idiyas.com/company/akrion-systems

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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