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Akrion Systems, LLC

USPTO Granted Patents = 22

% Expired Patents = 22.7

Trademarks = 3

Forward Citations = 109

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20 inventors (with patents filed for the assignee):

Ismail Kashkoush (8 out of 26 patents)

John A Korbler (6 out of 10 patents)

Hanjoo Lee (6 out of 7 patents)

4. Richard Novak (4 out of 25 patents)

5. Mark Rouillard (4 out of 4 patents)

6. Chad Michael Hosack (3 out of 6 patents)

7. James Brown (3 out of 3 patents)

8. Mario E Bran (3 out of 36 patents)

9. Gim-Syang Chen (2 out of 9 patents)

10. Zhi Lewis Liu (2 out of 2 patents)

11. Yan Fan (2 out of 2 patents)

12. Pejman Fani (2 out of 3 patents)

13. Christopher Hahn (2 out of 2 patents)

14. Zhi (Lewis) Liu (2 out of 3 patents)

15. Cole Franklin (2 out of 5 patents)

22 patents: Sort by Forward Citations

1. 9337065 - Systems and methods for drying a rotating substrate (2016-05-10),

2. 9305768 - Method for processing flat articles (2016-04-05),

3. 9070722 - System and method for the sonic-assisted cleaning of substrates utilizing a sonic-treated liquid (2015-06-30),

4. 9049520 - Composite transducer apparatus and system for processing a substrate and method of constructing the same (2015-06-02),

5. 8987032 - Method for selective under-etching of porous silicon (2015-03-24),

6. 8771427 - Method of manufacturing integrated circuit devices (2014-07-08),

7. 8741066 - Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting (2014-06-03),

8. 8739429 - Systems and methods for drying a rotating substrate (2014-06-03),

9. 8343287 - Apparatus for ejecting fluid onto a substrate and system and method incorporating the same (2013-01-01),

10. 8316869 - Acoustic energy system, method and apparatus for processing flat articles (2012-11-27),

11. 8279712 - Composite transducer apparatus and system for processing a substrate and method of constructing the same (2012-10-02),

12. 8276291 - Systems and methods for drying a rotating substrate (2012-10-02),

13. 8257505 - Method for megasonic processing of an article (2012-09-04),

14. 8084280 - Method of manufacturing a solar cell using a pre-cleaning step that contributes to homogeneous texture morphology (2011-12-27),

15. 8056253 - Systems and methods for drying a rotating substrate (2011-11-15),

Akrion Systems, LLC is a leading supplier of surface preparation solutions for the semiconductor and microelectronics industries. With over 50 years of experience, we provide innovative and high-performance wet processing equipment, including cleaning, etching, and electroplating systems. Our advanced technologies and reliable solutions are utilized by major manufacturers worldwide, helping them achieve superior process results and improve productivity.

This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 22 2026

Akrion Systems, LLC

22 Patents

#51 in

#288 in

#28,704 in the World

Akrion Systems, LLC

Forward Citations = 109

20 inventors:

Ismail Kashkoush (8 out of 26 patents)

John A Korbler (6 out of 10 patents)

Hanjoo Lee (6 out of 7 patents)

4. Richard Novak (4 out of 25 patents)

5. Mark Rouillard (4 out of 4 patents)

Please report any incorrect information to [email protected]

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