The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2019
Filed:
Oct. 13, 2015
Molecular Imprints, Inc., Austin, TX (US);
Canon Nanotechnologies, Inc., Austin, TX (US);
Douglas J. Resnick, Leander, TX (US);
Mario Johannes Meissl, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Sidlgata V. Sreenivasan, Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Canon Nanotechnologies, Inc., Austin, TX (US);
Abstract
A nanoimprint lithography template including, inter alia, a body having first and second opposed sides with a first surface disposed on the first side, the second side having a recess disposed therein, the body having first and second regions with the second region surrounding the first region and the recess in superimposition with the first region, with a portion of the first surface in superimposition with the first region being spaced-apart from the second side a first distance and a portion of the first surface in superimposition with the second region being spaced-apart from the second side a second distance, with the second distance being greater than the first distance; and a mold disposed on the first side of the body in superimposition a portion of the first region.