The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 29, 2018

Filed:

Oct. 14, 2016
Applicant:

Advanced Semiconductor, Inc., Kaohsiung, TW;

Inventors:

Min-Fong Shu, Kaohsiung, TW;

Yi-Hsiu Tseng, Kaohsiung, TW;

Kuan-Neng Chen, Kaohsiung, TW;

Shu-Chiao Kuo, Kaohsiung, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 23/13 (2006.01); H01L 23/498 (2006.01); H01L 23/31 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01);
U.S. Cl.
CPC ...
H01L 24/81 (2013.01); H01L 21/4853 (2013.01); H01L 21/563 (2013.01); H01L 23/13 (2013.01); H01L 23/3142 (2013.01); H01L 23/3185 (2013.01); H01L 23/49811 (2013.01); H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 23/49827 (2013.01); H01L 23/49838 (2013.01); H01L 24/05 (2013.01); H01L 24/13 (2013.01); H01L 24/16 (2013.01); H01L 24/73 (2013.01); H01L 23/49833 (2013.01); H01L 23/564 (2013.01); H01L 24/32 (2013.01); H01L 24/83 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05558 (2013.01); H01L 2224/05609 (2013.01); H01L 2224/05611 (2013.01); H01L 2224/05618 (2013.01); H01L 2224/05623 (2013.01); H01L 2224/05624 (2013.01); H01L 2224/05639 (2013.01); H01L 2224/05644 (2013.01); H01L 2224/05647 (2013.01); H01L 2224/05655 (2013.01); H01L 2224/05657 (2013.01); H01L 2224/05664 (2013.01); H01L 2224/05666 (2013.01); H01L 2224/05671 (2013.01); H01L 2224/05672 (2013.01); H01L 2224/05676 (2013.01); H01L 2224/05678 (2013.01); H01L 2224/1182 (2013.01); H01L 2224/131 (2013.01); H01L 2224/13026 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/13582 (2013.01); H01L 2224/13609 (2013.01); H01L 2224/13611 (2013.01); H01L 2224/13618 (2013.01); H01L 2224/13623 (2013.01); H01L 2224/13624 (2013.01); H01L 2224/13639 (2013.01); H01L 2224/13644 (2013.01); H01L 2224/13655 (2013.01); H01L 2224/13657 (2013.01); H01L 2224/13663 (2013.01); H01L 2224/13664 (2013.01); H01L 2224/13666 (2013.01); H01L 2224/13676 (2013.01); H01L 2224/13678 (2013.01); H01L 2224/13687 (2013.01); H01L 2224/1607 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/16235 (2013.01); H01L 2224/16237 (2013.01); H01L 2224/16238 (2013.01); H01L 2224/16501 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73104 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/8114 (2013.01); H01L 2224/8183 (2013.01); H01L 2224/81096 (2013.01); H01L 2224/81191 (2013.01); H01L 2224/81203 (2013.01); H01L 2224/81385 (2013.01); H01L 2224/81395 (2013.01); H01L 2224/81409 (2013.01); H01L 2224/81411 (2013.01); H01L 2224/81418 (2013.01); H01L 2224/81423 (2013.01); H01L 2224/81424 (2013.01); H01L 2224/81439 (2013.01); H01L 2224/81444 (2013.01); H01L 2224/81447 (2013.01); H01L 2224/81455 (2013.01); H01L 2224/81457 (2013.01); H01L 2224/81463 (2013.01); H01L 2224/81464 (2013.01); H01L 2224/81466 (2013.01); H01L 2224/81476 (2013.01); H01L 2224/81478 (2013.01); H01L 2224/81487 (2013.01); H01L 2224/81815 (2013.01); H01L 2224/81898 (2013.01); H01L 2224/83104 (2013.01); H01L 2224/83193 (2013.01); H01L 2224/92125 (2013.01); H01L 2924/00015 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/20103 (2013.01); H01L 2924/20104 (2013.01); H01L 2924/20105 (2013.01); H01L 2924/3511 (2013.01); H01L 2924/381 (2013.01);
Abstract

A method of manufacturing a bonding structure includes (a) providing a substrate, wherein the substrate includes a top surface and at least one bonding pad disposed adjacent to the top surface of the substrate, at least one bonding pad having a sloped surface with a first slope; (b) providing a semiconductor element, wherein the semiconductor element includes at least one pillar, and at least one pillar has a sidewall with a second slope, wherein the absolute value of the first slope is smaller than the absolute value of the second slope; and (c) bonding at least one pillar to a portion of the sloped surface of corresponding ones of the at least one bonding pad.


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