The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2018
Filed:
Jun. 05, 2015
Applicant:
Nexplanar Corporation, Hillsboro, OR (US);
Inventors:
William C. Allison, Beaverton, OR (US);
Diane Scott, Portland, OR (US);
Paul Andre Lefevre, Portland, OR (US);
James P. LaCasse, Portland, OR (US);
Alexander William Simpson, Hillsboro, OR (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); B24B 37/26 (2012.01); B24B 37/16 (2012.01); B24D 11/00 (2006.01); B24D 18/00 (2006.01); B24B 37/20 (2012.01); B24B 37/22 (2012.01);
U.S. Cl.
CPC ...
B24B 37/24 (2013.01); B24B 37/16 (2013.01); B24B 37/205 (2013.01); B24B 37/22 (2013.01); B24B 37/26 (2013.01); B24D 11/001 (2013.01); B24D 18/0009 (2013.01);
Abstract
Polishing pads with foundation layers and polishing surface layers are described. In an example, a polishing pad for polishing a substrate includes a foundation layer. A polishing surface layer is bonded to the foundation layer. Methods of fabricating polishing pads with a polishing surface layer bonded to a foundation layer are also described.