The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Jun. 02, 2016
Fujikin Incorporated, Osaka, JP;
National University Corporation Tohoku University, Miyagi, JP;
Tokyo Electron Ltd., Tokyo, JP;
Tadahiro Ohmi, Miyagi, JP;
Masahito Saito, Tokyo, JP;
Shoichi Hino, Tokyo, JP;
Tsuyoshi Shimazu, Miyagi, JP;
Kazuyuki Miura, Miyagi, JP;
Kouji Nishino, Osaka, JP;
Masaaki Nagase, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Kaoru Hirata, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Takashi Hirose, Osaka, JP;
Tsutomu Shinohara, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Tomokazu Imai, Osaka, JP;
Toshihide Yoshida, Osaka, JP;
Hisashi Tanaka, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
National University Corporation Tohuku University, Miyagi, JP;
Tokyo Electron Ltd., Tokyo, JP;
Abstract
A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP(where K is a proportionality constant) or as Qc=KP(P-P)(where K is a proportionality constant, m and n constants) by using orifice upstream side pressure Pand/or orifice downstream side pressure P. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.