The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2018
Filed:
Jul. 01, 2014
Ebara Corporation, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
When a polishing pad is attached to a polishing table, the polishing pad can be easily positioned on and attached to the polishing table and air pockets are prevented from forming. As a position guide memberis inserted into a guide holewith an attachment surface of a polishing paddownward, the polishing padis positioned on and attached to a polishing table. At this time, the guide holeof the polishing padis guided by the position guide memberand the polishing padis easily positioned so as to match the upper surface of the polishing tablewith the outer periphery thereof. Then, as release paper is gradually peeled off from a rear surface of the polishing pad, the portion where the release paper is peeled off is attached to the polishing table
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile