The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 30, 2018
Filed:
Jul. 07, 2015
Applicants:
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Rohm and Haas Electronic Materials Korea Ltd., Cheonan, KR;
Inventors:
Emad Aqad, Northborough, MA (US);
Mingqi Li, Shrewsbury, MA (US);
Shintaro Yamada, Shrewsbury, MA (US);
Sung Wook Cho, Gyeonggi-do, KR;
Assignees:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Rohm and Haas Electronic Materials Korea Ltd, Seoul, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/09 (2006.01); G03F 7/36 (2006.01); G03F 7/30 (2006.01); C07C 39/17 (2006.01); C07C 39/14 (2006.01); C07D 213/16 (2006.01); C08G 8/04 (2006.01); C08G 8/10 (2006.01); C08G 12/34 (2006.01); C08G 12/26 (2006.01); C08G 12/08 (2006.01); C09D 161/06 (2006.01); C09D 161/22 (2006.01); C08G 8/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/094 (2013.01); C07C 39/14 (2013.01); C07C 39/17 (2013.01); C07D 213/16 (2013.01); C08G 8/04 (2013.01); C08G 8/08 (2013.01); C09D 161/06 (2013.01); G03F 7/091 (2013.01); G03F 7/30 (2013.01); G03F 7/36 (2013.01); C07C 2603/18 (2017.05); C07C 2603/24 (2017.05); C07C 2603/40 (2017.05); C07C 2603/42 (2017.05); C07C 2603/50 (2017.05); C07C 2603/52 (2017.05);
Abstract
Polymeric reaction products of certain substituted tetraarylmethane monomers are useful as underlayers in semiconductor manufacturing processes.