The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2018
Filed:
Dec. 15, 2015
Bruker Nano, Inc., Santa Barbara, CA (US);
Chunzeng Li, Goleta, CA (US);
Yan Hu, Ventura, CA (US);
Ji Ma, Thousand Oaks, CA (US);
Jianli He, Goleta, CA (US);
Lin Huang, Santa Barbara, CA (US);
Stephen C. Minne, Santa Barbara, CA (US);
Henry Mittel, San Ramon, CA (US);
Weijie Wang, Thousand Oaks, CA (US);
Shuiqing Hu, Santa Barbara, CA (US);
Chanmin Su, Ventura, CA (US);
Bruker Nano, Inc., Santa Barbara, CA (US);
Abstract
An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.