The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Aug. 25, 2015
Sandisk Technologies Inc., Plano, TX (US);
Zhenyu Lu, Milpitas, CA (US);
Daxin Mao, San Jose, CA (US);
Tong Zhang, Palo Alto, CA (US);
Johann Alsmeier, San Jose, CA (US);
Wenguang Shi, Milpitas, CA (US);
Henry Chien, San Jose, CA (US);
SANDISK TECHNOLOGIES LLC, Plano, TX (US);
Abstract
A method of forming a three-dimensional memory device, includes forming a lower stack structure of insulating and first sacrificial material layers over a substrate, forming first memory openings through the lower stack structure and filling the first memory openings with a sacrificial fill material, replacing the first sacrificial material layers with first electrically conductive layers, forming an upper stack structure of insulating and second sacrificial material layers over the lower stack structure after replacing the first sacrificial material layers, forming second memory openings through the upper stack structure in areas overlying the first memory openings, replacing the second sacrificial material layers with second electrically conductive layers, removing the sacrificial fill material from the first memory openings underneath the second memory openings to form inter-stack memory openings after replacing the second sacrificial material layers, and forming memory stack structures within the inter-stack memory openings.