The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2017
Filed:
Jun. 23, 2015
Ebara Corporation, Tokyo, JP;
Masahiro Hatakeyama, Tokyo, JP;
Kenichi Suematsu, Tokyo, JP;
Ryo Tajima, Tokyo, JP;
Kiwamu Tsukamoto, Tokyo, JP;
Kenji Terao, Tokyo, JP;
Shoji Yoshikawa, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
A surface processing apparatus is an apparatus which performs surface processing on an inspection objectby irradiating the inspection object with an electron beam. A surface processing apparatus includes: an electron source(including lens system that controls beam shape of electron beam) which generates an electron beam; a stageon which an inspection objectto be irradiated with the electron beam is set; and an optical microscopefor checking a position to be irradiated with the electron beam. The current value of the electron beam which irradiates the inspection objectis set at 10 nA to 100 A.