The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2017
Filed:
Apr. 27, 2015
Nikon Corporation, Tokyo, JP;
Soichi Owa, Kumagaya, JP;
Nobutaka Magome, Kumagaya, JP;
Shigeru Hirukawa, Tokyo, JP;
Yoshihiko Kudo, Tokyo, JP;
Jiro Inoue, Kumagaya, JP;
Hirotaka Kohno, Kumagaya, JP;
Masahiro Nei, Yokohama, JP;
Motokatsu Imai, Yokohama, JP;
Hiroyuki Nagasaka, Kumagaya, JP;
Kenichi Shiraishi, Saitama, JP;
Yasufumi Nishii, Kumagaya, JP;
Hiroaki Takaiwa, Kumagaya, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
An exposure apparatus exposes a substrate by projecting a pattern image onto the substrate through a liquid. The exposure apparatus includes a projection optical system by which the pattern image is projected onto the substrate, and a movable member which is movable relative to the projection optical system. A liquid-repellent member, at least a part of a surface of which is liquid-repellent, is provided detachably on the movable member, the liquid-repellent member being different from the substrate.