Kumagaya, Japan

Hiroaki Takaiwa

This inventor holds 32 USPTO granted patents and 10 published patent applications and 19 EPO patents, primarily in Exposure Apparatus. Top assignee: Nikon Corporation. Active years: 2007-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Hiroaki Takaiwa. Retrieved from https://idiyas.com/inventor/hiroaki-takaiwa

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 32 

% Patents Active = 12.5

 

Average Co-Inventor Count = 2.8

ph-index = 7

Forward Citations = 163(Granted Patents)


Company Filing History:


Years Active: 2007-2018

Loading Chart...
Loading Chart...
Areas of Expertise:
Exposure Apparatus
Device Manufacturing
Liquid Recovery
Immersion Lithography
Substrate Stage
Optical Part
Residual Liquid Detection
Wafer Table
32 patents (USPTO):Explore Patents

Title: **Hiroaki Takaiwa: Innovator in Exposure Technology**

Introduction

Hiroaki Takaiwa, a renowned inventor based in Kumagaya, Japan, has made significant contributions to the field of optics and exposure technology. With an impressive portfolio of 32 patents, Takaiwa's work focuses primarily on advanced exposure apparatuses essential for device manufacturing.

Latest Patents

Among his latest innovations are patents related to exposure apparatuses and device manufacturing methods. One notable patent describes an exposure apparatus that comprises a projection system and an immersion member, designed for high-precision exposure of substrates. This apparatus utilizes a movable stage that supports substrates while efficiently managing immersion liquids through strategically placed supply and recovery ports. Another recent patent outlines a method for producing devices by employing a substrate table equipped with a replaceable liquid-repellent flat surface, ensuring that liquid does not compromise exposure accuracy. These inventions highlight Takaiwa's commitment to enhancing the performance of exposure technologies.

Career Highlights

Hiroaki Takaiwa is currently affiliated with Nikon Corporation, a leader in imaging technology. His expertise in developing cutting-edge exposure systems has positioned him as a key figure in the advancement of optical materials and processes. Through his innovative designs and methodologies, he has played a crucial role in enhancing the capabilities of device manufacturing.

Collaborations

Throughout his career, Takaiwa has collaborated with esteemed coworkers such as Hiroyuki Nagasaka and Shigeru Hirukawa. These partnerships have fostered a dynamic exchange of ideas and fostered further innovations in their respective fields.

Conclusion

Hiroaki Takaiwa's contributions to exposure technology underscore his status as a leading inventor in the optical domain. With his wealth of knowledge and a proven track record of patents, he continues to push the boundaries of what is possible in device manufacturing. His work not only enhances the accuracy and efficiency of exposure systems but also serves as an inspiration for future innovations in the industry.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
Loading…