The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2017
Filed:
Nov. 19, 2015
Applied Materials Israel Ltd., Rehovot, IL;
Yoram Uziel, Misgav, IL;
Ron Naftali, Shoham, IL;
Ofer Adan, Rehovot, IL;
Haim Feldman, Nof-Ayalon, IL;
Ofer Shneyour, Hod-Hasharon, IL;
Ron Bar-Or, Ramat-Gan, IL;
Doron Korngut, Modiin, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.