The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2017
Filed:
Dec. 24, 2014
Hitachi High-technologies Corporation, Tokyo, JP;
Yusuke Ominami, Tokyo, JP;
Junichi Katane, Tokyo, JP;
Shinsuke Kawanishi, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is a charged particle beam device capable of observing the interior and the surface of a sample in a simple manner. This charged particle beam device operates in a transmitted charged particle image mode and a secondary charged particle image mode. In the transmitted charged particle image mode, a transmitted charged particle image is produced on the basis of a detection signal () associated with light emitted from a light-emitting member () that emits light upon being irradiated with transmitted charged particles transmitted through the interior of a sample (). In the secondary charged particle image mode, a secondary charged particle image is produced on the basis of a detection signal () caused by reflected charged particles or secondary charged particles () from the sample ().