The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2017
Filed:
Nov. 27, 2014
Asml Netherlands B.v., Veldhoven, NL;
Andrey Alexandrovich Nikipelov, Veldhoven, NL;
Vadim Yevgenyevich Banine, Veldhoven, NL;
Pieter Willem Herman De Jager, Veldhoven, NL;
Gosse Charles De Vries, Veldhoven, NL;
Olav Waldemar Vladimir Frijns, Veldhoven, NL;
Leonardus Adrianus Gerardus Grimminck, Veldhoven, NL;
Andelko Katalenic, Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Veldhoven, NL;
Erik Loopstra, Veldhoven, NL;
Wouter Joep Engelen, Veldhoven, NL;
Petrus Rutgerus Bartraij, Veldhoven, NL;
Teis Johan Coenen, Veldhoven, NL;
Wilhelmus Patrick Elisabeth Maria Op'T Root, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An injector arrangement for providing an electron beam. The injector arrangement comprises a first injector for providing electron bunches, and a second injector for providing electrons bunches. The injector arrangement is operable in a first mode in which the electron beam comprises electron bunches provided by the first injector only and a second mode in which the electron beam comprises electron bunches provided by the second injector only.