The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 25, 2017

Filed:

Jul. 19, 2013
Applicant:

Hitachi Chemical Company, Ltd., Tokyo, JP;

Inventors:

Shuichiro Adachi, Ibaraki, JP;

Masato Yoshida, Ibaraki, JP;

Takeshi Nojiri, Ibaraki, JP;

Yasushi Kurata, Ibaraki, JP;

Tooru Tanaka, Ibaraki, JP;

Akihiro Orita, Ibaraki, JP;

Tsuyoshi Hayasaka, Ibaraki, JP;

Takashi Hattori, Tokyo, JP;

Mieko Matsumura, Tokyo, JP;

Keiji Watanabe, Tokyo, JP;

Masatoshi Morishita, Tokyo, JP;

Hirotaka Hamamura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0216 (2014.01); C07F 9/00 (2006.01); H01L 31/18 (2006.01); C07F 5/06 (2006.01); C07F 7/00 (2006.01); H01L 31/02 (2006.01);
U.S. Cl.
CPC ...
C07F 9/005 (2013.01); C07F 5/069 (2013.01); C07F 7/006 (2013.01); H01L 31/02013 (2013.01); H01L 31/02161 (2013.01); H01L 31/02168 (2013.01); H01L 31/1864 (2013.01); H01L 31/1868 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract

A composition for forming a passivation layer, comprising a compound represented by Formula (I): M(OR). In Formula (I), M comprises at least one metal element selected from the group consisting of Nb, Ta, V, Y and Hf, each Rindependently represents an alkyl group having from 1 to 8 carbon atoms or an aryl group having from 6 to 14 carbon atoms, and m represents an integer from 1 to 5.


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