The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2017
Filed:
Mar. 28, 2013
Nikon Metrology NV, Heverlee, BE;
Patrick Blanckaert, Boortmeerbeek, BE;
Frank Thys, Willebroek, BE;
Raf Nysen, Veltem-Beisem, BE;
Geert Vandenhoudt, Kessel-Lo, BE;
NIKON METROLOGY NV, Heverlee, BE;
Abstract
The present invention relates to a scanning probe () for the dimensional acquisition of an object () by irradiating the object () with light and detecting reflected light comprising: a detection unit () comprising an imaging sensor () and a sensor lens assembly () for detecting the reflected light, a light projecting unit () comprising a light source () for generating light, and source optics () for focusing the light, and light plane generating optics () for generating a light plane () for irradiating the object, and an adjustment mechanism () comprised in the light projecting unit (), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe ().