The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 27, 2017

Filed:

Jun. 23, 2015
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Biow-Hiem Ong, Singapore, SG;

Chih-Chiang Tu, Tauyen, TW;

Chien-Hung Lai, Taichung, TW;

Jong-Yuh Chang, Jhubei, TW;

Kuang-Yu Liu, Yuanlin Township, Changhua County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01); G01N 21/59 (2006.01); G01N 21/55 (2014.01); G01N 21/956 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8806 (2013.01); G01N 21/55 (2013.01); G01N 21/59 (2013.01); G01N 21/9501 (2013.01); G01N 21/956 (2013.01); G01N 2021/558 (2013.01); G01N 2021/8809 (2013.01); H01L 22/12 (2013.01); H01L 22/20 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not identified in the second set of defect candidates.


Find Patent Forward Citations

Loading…