The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2017
Filed:
Dec. 10, 2010
Applicants:
Emad Aqad, Northborough, MA (US);
Mingqi LI, Shrewsbury, MA (US);
Joseph Mattia, Framingham, MA (US);
Cheng-bai Xu, Southborough, MA (US);
Inventors:
Emad Aqad, Northborough, MA (US);
Mingqi Li, Shrewsbury, MA (US);
Joseph Mattia, Framingham, MA (US);
Cheng-Bai Xu, Southborough, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
C07J 31/00 (2006.01); G03F 7/004 (2006.01); C07C 381/12 (2006.01); G03F 7/038 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 381/12 (2013.01); C07J 31/006 (2013.01); G03F 7/0046 (2013.01); G03F 7/0382 (2013.01);
Abstract
New photoacid generator compounds ('PAGs') are provided that comprise a cholate moiety and photoresist compositions that comprise such PAG compounds.