The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Mar. 11, 2011
Nicolaas Ten Kate, Almkerk, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Robbert Jan Voogd, Neerpelt, BE;
Giovanni Francisco Nino, Maastricht, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Marinus Jan Remie, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Bastiaan Andreas Wilhelmus Hubertus Knarren, Nederweert-Eind, NL;
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Robbert Jan Voogd, Neerpelt, BE;
Giovanni Francisco Nino, Maastricht, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Marinus Jan Remie, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or temperature sensor on a surface adjacent the substrate supporting area.