The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2017
Filed:
Mar. 12, 2012
Martin Rocktaeschel, Abtsgmuend, DE;
Hartmut Enkisch, Aalen, DE;
Franz-josef Stickel, Aalen, DE;
Oliver Natt, Aalen, DE;
Hans-juergen Mann, Oberkochen, DE;
Sascha Migura, Aalen-Unterrombach, DE;
Martin Rocktaeschel, Abtsgmuend, DE;
Hartmut Enkisch, Aalen, DE;
Franz-Josef Stickel, Aalen, DE;
Oliver Natt, Aalen, DE;
Hans-Juergen Mann, Oberkochen, DE;
Sascha Migura, Aalen-Unterrombach, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A mirror including a substrate and a reflective coating that includes a first group of layers and a second group of layers arranged between the substrate and the first group of layers. Both the first and second groups of layers include a plurality of alternating first material layers and second material layers, arranged one above another. The refractive index of the first material for radiation in the range of 5-30 nm is greater than the refractive index of the second material in that wavelength range. The first group of layers is configured to have a number of layers that is greater than 20, such that, upon irradiation with radiation having a wavelength in the range of 5-30 nm, less than 20% of the radiation reaches the second group of layers, which has a layer thickness variation for correcting the surface form of the mirror.