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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9564383 B1

PDFFull Text
Expired
Date of Patent:
Feb. 07, 2017

Filed:

Jun. 08, 2015

Low-k dielectric layer and porogen

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Joung-Wei Liou, Zhudong, TW;

Hui-Chun Yang, Hsin-Chu, TW;

Yu-Yun Peng, Hsin-Chu, TW;

Keng-Chu Lin, Ping-Tung, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Julia Slutsker

Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/31 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 23/31 (2013.01); H01L 21/02123 (2013.01); H01L 21/02203 (2013.01); H01L 21/02274 (2013.01); H01L 21/7682 (2013.01); H01L 21/76801 (2013.01); H01L 21/76829 (2013.01); H01L 23/481 (2013.01); H01L 23/5329 (2013.01); H01L 23/53238 (2013.01); H01L 23/53295 (2013.01); H01L 2221/1047 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A system and method for a low-k dielectric layer are provided. A preferred embodiment comprises forming a matrix and forming a porogen within the matrix. The porogen comprises an organic ring structure with fewer than fifteen carbons and a large percentage of single bonds. Additionally, the porogen may have a viscosity greater than 1.3 and a Reynolds numbers less than 0.5.

Find Patent Forward Citations

Liou, Joung-Wei. (2017). Low-k dielectric layer and porogen (U.S. Patent No. 9564383). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9564383

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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