The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 20, 2016

Filed:

Nov. 06, 2014
Applicant:

Invensas Corporation, San Jose, CA (US);

Inventors:

Charles G. Woychik, San Jose, CA (US);

Eric S. Tosaya, Fremont, CA (US);

Rajesh Katkar, San Jose, CA (US);

Assignee:

Invensas Corporation, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/48 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2006.01); H01L 21/683 (2006.01); H01L 23/13 (2006.01); H01L 23/498 (2006.01);
U.S. Cl.
CPC ...
H01L 21/4853 (2013.01); H01L 21/6831 (2013.01); H01L 21/6838 (2013.01); H01L 23/13 (2013.01); H01L 23/49811 (2013.01); H01L 23/49816 (2013.01); H01L 23/49827 (2013.01); H01L 25/00 (2013.01); H01L 25/065 (2013.01); H01L 25/0655 (2013.01); H01L 25/50 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/73204 (2013.01); H01L 2924/15174 (2013.01); H01L 2924/15192 (2013.01); H01L 2924/15311 (2013.01); H01L 2924/16152 (2013.01); H01L 2924/16195 (2013.01);
Abstract

A workpiece () has protruding conductive features () at least on a first side. The second side is processed while the workpiece is held from the first side by a holder (H). To prevent damage to the protruding features and flatten the workpiece (which could be otherwise warped), a spacer () is inserted between the workpiece and the holder. The spacer has holes () receiving the protruding features. The workpiece can be held by forces generated by the holder such as vacuum or an electrostatic force, without an adhesive. Other features and advantages are provided.


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