The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 2016
Filed:
Apr. 21, 2014
Kla-tencor Corporation, Milpitas, CA (US);
Chien-Huei (Adam) Chen, San Jose, CA (US);
Chris Maher, Tracy, CA (US);
Patrick Huet, San Jose, CA (US);
Tai-Kam Ng, San Jose, CA (US);
John Raymond Jordan, III, Mountain View, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.