The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 2016
Filed:
Nov. 19, 2014
Air Products and Chemicals, Inc., Allentown, PA (US);
William Jack Casteel, Jr., Emmaus, PA (US);
Seiji Inaoka, Macungie, PA (US);
Madhukar Bhaskara Rao, Fogelsville, PA (US);
Brenda Faye Ross, Whitehall, PA (US);
Yi-Chia Lee, Chupei, TW;
Wen Dar Liu, Chupei, TW;
Tianniu Chen, Westford, MA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Aqueous compositions for stripping titanium nitride (TiN or TiNxOy) hard mask and removing etch residue are low pH aqueous composition comprising solvent, a weakly coordinating anion, amine, and at least two non-oxidizing trace metal ions. The aqueous compositions contain no non-ambient oxidizer, and are exposed to air. Bifluoride, or metal corrosion inhibitor may be added to the aqueous composition. Systems and processes use the aqueous compositions for stripping titanium nitride (TiN or TiNxOy) hard mask and removing titanium nitride (TiN or TiNxOy) etch residue.