The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 2016

Filed:

Apr. 28, 2015
Applicant:

Freescale Semiconductor, Inc., Austin, TX (US);

Inventors:

Won Gi Min, Chandler, AZ (US);

Hongzhong Xu, Gilbert, AZ (US);

Zhihong Zhang, Tempe, AZ (US);

Jiang-Kai Zuo, Chandler, AZ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/06 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7823 (2013.01); H01L 29/063 (2013.01); H01L 29/0634 (2013.01); H01L 29/0847 (2013.01); H01L 29/0882 (2013.01); H01L 29/1083 (2013.01); H01L 29/1087 (2013.01); H01L 29/1095 (2013.01); H01L 29/7816 (2013.01); H01L 29/7835 (2013.01); H01L 29/0653 (2013.01); H01L 29/0692 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Breakdown voltage BVdss is enhanced and ON-resistance reduced in RESURF devices, e.g., LDMOS transistors, by careful charge balancing, even when body and drift region charge balance is not ideal, by: (i) providing a plug or sinker near the drain and of the same conductivity type extending through the drift region at least into the underlying body region, and/or (ii) applying bias Viso to a surrounding lateral doped isolation wall coupled to the device buried layer, and/or (iii) providing a variable resistance bridge between the isolation wall and the drift region. The bridge may be a FET whose source-drain couple the isolation wall and drift region and whose gate receives control voltage Vc, or a resistor whose cross-section (X, Y, Z) affects its resistance and pinch-off, to set the percentage of drain voltage coupled to the buried layer via the isolation wall.


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