The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2016
Filed:
Dec. 12, 2014
Applicant:
Cabot Microelectronics Corporation, Aurora, IL (US);
Inventors:
Sudeep Pallikkara Kuttiatoor, Aurora, IL (US);
Kevin Dockery, Aurora, IL (US);
Prativa Pandey, Aurora, IL (US);
Renhe Jia, Naperville, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/311 (2006.01); C03C 15/00 (2006.01); C23F 1/16 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C03C 15/00 (2013.01); C23F 1/16 (2013.01); H01L 21/31111 (2013.01);
Abstract
The invention provides a chemical-mechanical polishing composition containing a ceria abrasive, an ionic polymer of formula I: