The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 16, 2016

Filed:

May. 04, 2015
Applicant:

Xintec Inc., Taoyuan, TW;

Inventors:

Yen-Shih Ho, Kaohsiung, TW;

Shu-Ming Chang, New Taipei, TW;

Yung-Tai Tsai, New Taipei, TW;

Tsang-Yu Liu, Zhubei, TW;

Assignee:

XINTEC INC., Taoyuan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/146 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 27/14687 (2013.01); H01L 21/67092 (2013.01); H01L 21/6836 (2013.01); H01L 27/14685 (2013.01); H01L 31/18 (2013.01);
Abstract

A manufacturing method of a semiconductor structure includes the following steps. A temporary bonding layer is used to adhere a carrier to a first surface of a wafer. A second surface of the wafer is adhered to an ultraviolet tape on a frame, and the temporary bonding layer and the carrier are removed. A protection tape is adhered to the first surface of the wafer. An ultraviolet light is used to irradiate the ultraviolet tape. A dicing tape is adhered to the protection tape and the frame, and the ultraviolet tape is removed. A first cutter is used to dice the wafer from the second surface of the wafer, such that plural chips and plural gaps between the chips are formed. A second cutter with a width smaller than the width of the first cutter is used to cut the protection tape along the gaps.


Find Patent Forward Citations

Ho, Yen-Shih. (2016). Manufacturing method of semiconductor structure with protein tape (U.S. Patent No. 9419050). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9419050

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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